Tampere University of Technology

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Experiments with the Micro LPC110 Clean Room Particle Counter

Activity: Talk or presentationConference presentation

Details

Jorma Keskinen - Speaker

1988

Event (Conference)

TitleSymposium on Particulate Contamination Control in Microelectroni cs, AAAR`88 Annual Meeting, Chapel Hill, USA, 10.-14.10.1988
Period1/01/88 → …

Country of activity

Publication forum classification

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ID: 12344842