Tampere University of Technology

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HfO2 and HfNx diffusion barrier coatings by ALD

Activity: Talk or presentationConference presentation

Details

Minna Kotilainen - Speaker

9 Dec 2015

External organisation

NameMasaryk University
LocationKamenice 5/A13
City625 00 Brno
CountryCzech Republic

Country of activity

Nature of activity

ID: 12585555