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A 3 DOF piezohydraulic parallel micromanipulator

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review


Original languageEnglish
Title of host publicationProceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium
Publication statusPublished - 1998
Publication typeA4 Article in a conference publication


The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control.

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