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A 3 DOF piezohydraulic parallel micromanipulator

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A 3 DOF piezohydraulic parallel micromanipulator. / Kallio, P.; Lind, M.; Zhou, Q.; Koivo, H.N.

Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium. 1998. p. 1823-1828.

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Harvard

Kallio, P, Lind, M, Zhou, Q & Koivo, HN 1998, A 3 DOF piezohydraulic parallel micromanipulator. in Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium. pp. 1823-1828.

APA

Kallio, P., Lind, M., Zhou, Q., & Koivo, H. N. (1998). A 3 DOF piezohydraulic parallel micromanipulator. In Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium (pp. 1823-1828)

Vancouver

Kallio P, Lind M, Zhou Q, Koivo HN. A 3 DOF piezohydraulic parallel micromanipulator. In Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium. 1998. p. 1823-1828

Author

Kallio, P. ; Lind, M. ; Zhou, Q. ; Koivo, H.N. / A 3 DOF piezohydraulic parallel micromanipulator. Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium. 1998. pp. 1823-1828

Bibtex - Download

@inproceedings{0136fdc671a44a7d8c52eb173610911e,
title = "A 3 DOF piezohydraulic parallel micromanipulator",
abstract = "The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control.",
author = "P. Kallio and M. Lind and Q. Zhou and H.N. Koivo",
note = "julkaistu vain CD:n{\"a}<br/>Contribution: organisation=aci,FACT1=1",
year = "1998",
language = "English",
pages = "1823--1828",
booktitle = "Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium",

}

RIS (suitable for import to EndNote) - Download

TY - GEN

T1 - A 3 DOF piezohydraulic parallel micromanipulator

AU - Kallio, P.

AU - Lind, M.

AU - Zhou, Q.

AU - Koivo, H.N.

N1 - julkaistu vain CD:nä<br/>Contribution: organisation=aci,FACT1=1

PY - 1998

Y1 - 1998

N2 - The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control.

AB - The paper presents a new parallel micromanipulator that is composed of three piezohydraulic actuation systems. The basic elements of the actuation system are a piezoelectric actuator, a bellows and hydraulic oil. The use of the flexible bellows results in a new type of parallel structure, where the joints are integrated into actuator links. The joint-free tripod-like micromanipulator is controlled using a real-time control software that is based on a multi-level architecture. Control is organised in four levels for non-linearity compensation, position feedback control, supervision and tackling of automatic operations. The presented micromanipulator provides an exceptional combination of submicrometer resolution, large work space, miniature size and advanced control.

M3 - Conference contribution

SP - 1823

EP - 1828

BT - Proceedings of the 1998 IEEE International Conference on Robotics and Automation, May 16-20, Leuwen , Belgium

ER -