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Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates

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Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates. / Vuoristo, P.; Mäntylä, T.; Kettunen, P.

In: Journal of Vacuum Science & Technology A, Vol. 4, No. 6, 1986, p. 2932.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Vuoristo, P, Mäntylä, T & Kettunen, P 1986, 'Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates', Journal of Vacuum Science & Technology A, vol. 4, no. 6, pp. 2932.

APA

Vuoristo, P., Mäntylä, T., & Kettunen, P. (1986). Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates. Journal of Vacuum Science & Technology A, 4(6), 2932.

Vancouver

Vuoristo P, Mäntylä T, Kettunen P. Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates. Journal of Vacuum Science & Technology A. 1986;4(6):2932.

Author

Vuoristo, P. ; Mäntylä, T. ; Kettunen, P. / Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates. In: Journal of Vacuum Science & Technology A. 1986 ; Vol. 4, No. 6. pp. 2932.

Bibtex - Download

@article{38ed01ccad8e4f908091f4e40855eaa0,
title = "Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates",
author = "P. Vuoristo and T. M{\"a}ntyl{\"a} and P. Kettunen",
note = "Contribution: organisation=mol,FACT1=1",
year = "1986",
language = "English",
volume = "4",
pages = "2932",
journal = "Journal of Vacuum Science & Technology A",
issn = "1553-1813",
number = "6",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Adhesion and Structure of Rf-sputtered Magnesium Oxide Coatings on Various Metal Substrates

AU - Vuoristo, P.

AU - Mäntylä, T.

AU - Kettunen, P.

N1 - Contribution: organisation=mol,FACT1=1

PY - 1986

Y1 - 1986

M3 - Article

VL - 4

SP - 2932

JO - Journal of Vacuum Science & Technology A

JF - Journal of Vacuum Science & Technology A

SN - 1553-1813

IS - 6

ER -