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Approximating circles by polygons in anisotropic etching of {100} silicon

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Details

Original languageEnglish
Title of host publicationProceedings of Eurosensors XIII
Pages531-532
Publication statusPublished - 1999
Externally publishedYes
Publication typeA4 Article in a conference publication