Tampere University of Technology

TUTCRIS Research Portal

Characteristics of two types of mems resonator structures in SOI applications

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Details

Original languageEnglish
Title of host publication203rd Meeting of The Electrochemical Society, Le Palais des Congrès, Paris, France, April 27 - May 2, 2003
Pages267-272
Publication statusPublished - 2003
Publication typeB3 Non-refereed article in conference proceedings

Publication forum classification