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Composition of rf-sputtered alumina coatings determined by XPS method

Research output: Book/ReportCommissioned reportProfessional

Details

Original languageEnglish
Place of PublicationOtaniemi
PublisherHelsinki University of Technology, Department of Technical Physics
Publication statusPublished - 1982
Publication typeD4 Published development or research report or study

Publication series

NameProc. of the XVI Annual Conference of the Finnish Physical Society, report
PublisherHelsinki University of Technology, Department of Technical Physics
No.466

Publication forum classification