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Configurations of laser interference lithography for 2D/3D nanostructures of optical functional materials

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Details

Original languageEnglish
Title of host publication2012 2nd International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale, 3M-NANO 2012, 29 August - 1 Spetember 2012 Xi'an, China
PublisherInstitute of Electrical and Electronics Engineers IEEE
Pages169-174
Number of pages6
ISBN (Electronic)978-1-4673-4589-7
ISBN (Print)978-1-4673-4588-0
DOIs
Publication statusPublished - 2012
Publication typeA4 Article in a conference publication

Publication series

NameInternational Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

Publication forum classification

Field of science, Statistics Finland