Design and development of a novel passive wireless ultrasensitive RF temperature transducer for remote sensing
Research output: Contribution to journal › Article › Scientific › peer-review
Details
| Original language | English |
|---|---|
| Article number | 6208808 |
| Pages (from-to) | 2756-2766 |
| Number of pages | 11 |
| Journal | IEEE Sensors Journal |
| Volume | 12 |
| Issue number | 9 |
| DOIs | |
| Publication status | Published - 2012 |
| Publication type | A1 Journal article-refereed |
Abstract
A wireless, passive, and ultrasensitive temperature transducer is presented in this paper. The transducer consists of split ring resonators loaded with micro-bimorph cantilevers, which can potentially operate up to millimeter-wave frequencies (above 30 GHz). As the temperature changes, the bimorph cantilevers deflect and result in a shift of the resonant frequency of the split rings. A design is proposed, that has a maximum sensitivity of 2.62 GHz/μ m, in terms of frequency shift per deflection unit, corresponding to a sensitivity of 498 MHz/°C for an operating frequency around 30 GHz, i.e., a frequency shift of 1.6% per °C. Theoretically, it's about two orders of magnitude higher than the existing sensors observed in the same class. This sensor design also offers a high Q factor and is ultra-compact, enabling easy fabrication and integration in micro-electromechanical systems technology. Depending on the choice of materials, the proposed designs can also be utilized in harsh environments. As a proof of concept, a prototype is implemented around 4.7 GHz which exhibits a frequency shift of 0.05%/°C, i.e., 17 times more sensitive than the existing sensors.
ASJC Scopus subject areas
Keywords
- Micro-electromechanical systems (MEMS) cantilevers, passive remote sensing, radar cross section (RCS), radio frequency transducer, split ring resonators (SRRs), temperature sensor, wireless sensor