Effects of thinning and heating for TiO2/AlInP junctions
Research output: Contribution to journal › Article › Scientific › peer-review
Details
| Original language | English |
|---|---|
| Pages (from-to) | 6-9 |
| Number of pages | 4 |
| Journal | Journal of Electron Spectroscopy and Related Phenomena |
| Volume | 205 |
| DOIs | |
| Publication status | Published - 24 Aug 2015 |
| Publication type | A1 Journal article-refereed |
Abstract
TiO2/AlInP junctions are used to construct the antireflection coatings for solar cells and to passivate III-V nanostructure surfaces. The thickness of AlInP epilayer affects light absorption and appropriate Al composition determining further the energy barrier for carriers. We report on reducing the AlInP thickness by dry etching down to 10 nm without introducing harmful defect states at TiO<inf>2</inf>/AlInP interface and AlInP/GaInP interface below, according to photoluminescence. Synchrotron-radiation photoelectron spectroscopy reveals that increased oxidation of phosphorus is not harmful to TiO<inf>2</inf>/AlInP and that post heating of the material enhances AlInP oxidation and group III element segregation resulting in decreased material homogeneity.
ASJC Scopus subject areas
Keywords
- AlInP, Passivation, Solar cell, TiO<inf>2</inf>