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Electrical Contacts in SOI MEMS Using Aerosol Jet Printing

Research output: Contribution to journalArticleScientificpeer-review


Original languageEnglish
Pages (from-to)34-40
JournalIEEE Journal of the Electron Devices Society
Early online date19 Oct 2017
Publication statusPublished - 2017
Publication typeA1 Journal article-refereed


In this study, an additive method to make electrical contacts in SOI MEMS devices with aerosol jet printing is introduced. Small grooves were etched to the frame of MEMS accelerometer in the same step with the active structure release. Aluminum ink was jetted to the trenches in wafer-level to bridge the device layer to the handle wafer with the minimum amount of material. After subsequent annealing ohmic contacts between p-type device layer and p-type handle silicon were verified by I-V measurements. The via resistance less than 4 Y per via is measured. The method demonstrated in this work provides simple and low-cost approach for SOI handle contact where additional packaging of wafer process steps can be avoided.


  • additive manufacturing., aerosol jet printing, Aerosols, Cavity resonators, Electrical resistance measurement, Ink, inkjet printing, microelectromechanical systems (MEMS), Micromechanical devices, Printing, silicon on insulator (SOI), Silicon-on-insulator

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