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Enhancing laser scanner accuracy by grid correction

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Details

Original languageEnglish
Title of host publicationPhotonics West 2010 - MOEMS-MEMS: Micro- and Nanofabrication, 23-28 January, 2010, San Francisco, California, USA. Proceedings of SPIE
EditorsMary Ann Maher, Jung-Chih Chiao, J. Resnick Paul
Place of PublicationBellingham, WA
PublisherSPIE
Pages1-9
Number of pages9
ISBN (Print)978-0-8194-8020-0
DOIs
Publication statusPublished - 2010
Publication typeA4 Article in a conference publication
EventSPIE CONFERENCE PROCEEDINGS -
Duration: 1 Jan 1900 → …

Conference

ConferenceSPIE CONFERENCE PROCEEDINGS
Period1/01/00 → …

Publication forum classification

Field of science, Statistics Finland