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Evaluation of principal characteristics of circular resonator in thin film applications

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review


Original languageEnglish
Title of host publicationDTIP2003. Design, Test, Integration and Packaging of MEMS/MOEMS 2003, 5-7 May 2003, Cannes, France
EditorsK. Bergman
Publication statusPublished - 2003
Publication typeA4 Article in a conference publication

Publication forum classification