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Formation of 4-beam laser interference patterns for nanolithography

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Details

Original languageEnglish
Title of host publicationPhotonic Materials, Devices, and Applications II, 2.5.2007, Gran Canaria, Spain. Proceedings of the SPIE
EditorsA. Serpengüzel
Pages8 p
DOIs
Publication statusPublished - 2007
Externally publishedYes
Publication typeA4 Article in a conference publication

Publication forum classification