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Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS

Research output: Chapter in Book/Report/Conference proceedingChapterScientificpeer-review

Details

Original languageEnglish
Title of host publicationHandbook of Silicon Based MEMS Materials and Technologies
PublisherElsevier
Pages550-564
Number of pages15
Edition2
ISBN (Print)978-0-323-29965-7
DOIs
Publication statusPublished - 2015
Publication typeA3 Part of a book or another research book

Publication series

NameMicro and Nano Technologies

Publication forum classification