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Laser Diagnostics of Chemical Vapor Deposition

Research output: Book/ReportDoctoral thesisCollection of Articles

Details

Original languageEnglish
Place of PublicationTampere
PublisherTampere University of Technology
Number of pages121
Publication statusPublished - 2000
Publication typeG5 Doctoral dissertation (article)

Publication series

NameTampereen teknillinen korkeakoulu. Julkaisuja
PublisherTampere University of Technology
Volume310

Publication forum classification