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Matalan lämpötilan CVD-menetelmistä

Research output: Book/ReportCommissioned reportProfessional

Details

Original languageFinnish
Place of PublicationTampere
PublisherTampereen teknillinen korkeakoulu
Number of pages22
Publication statusPublished - 1984
Publication typeD4 Published development or research report or study

Publication series

NameTampereen teknillinen korkeakoulu, Materiaaliopin laitos, Raportti
PublisherTampereen teknillinen korkeakoulu
No.30/1984

Publication forum classification