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Method for manufacturing thin film, and thin film

Research output: PatentScientific

Details

Original languageEnglish
Patent numberUS6875642 B2
IPCB05D5/00, B05D1/18, B05D7/00
Priority date23/11/01
Publication statusPublished - 5 Apr 2005
Externally publishedYes
Publication typeH1 Granted patent