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Method for measuring the active KOH concentration in a KOH etching process

Research output: PatentScientific

Details

Original languageEnglish
Patent numberUS8628678 B2
IPCG01N21/42, C03C25/68, C03C15/00
Priority date11/10/06
Publication statusPublished - 14 Jan 2014
Externally publishedYes
Publication typeH1 Granted patent