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Morphology evolution of PS-b-PDMS block copolymer and its hierarchical directed self-assembly on block copolymer templates

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Pages (from-to)1-7
Number of pages7
JournalMicroelectronic Engineering
Volume192
DOIs
Publication statusPublished - 15 May 2018
Publication typeA1 Journal article-refereed

Abstract

Cylinder-forming polystyrene-block-polydimethylsiloxane (PS-b-PDMS, 27.2k-b-11.7k, SD39) block copolymer having a total molecular weight of 39 kg mol−1 was exploited to achieve in-plane morphologies of lines, dots and antidots. Brush-free self-assembly of the SD39 on silicon substrates was investigated using solvents that were PS or PDMS selective, neutral and non-solvents based on their Hansen solubility parameters. The different morphologies were achieved with annealing times ranging from 10 min to 1 h at room temperature. The SD39 patterns were used as an etch mask for transferring the pattern into the underlying substrate. Directed self-assembly and hierarchical directed self-assembly on block copolymer templates for confinement of dots was successfully demonstrated. The strategy for achieving multiple morphologies using one BCP by mere choice of the annealing solvents on unmodified substrates provides a simplified method for surface nanopatterning, templated growth of nanomaterials and nanofabrication.

Keywords

  • Block copolymer, Hansen solubility, Hierarchical self-assembly, Selective solvent

Publication forum classification

Field of science, Statistics Finland