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Multi-beam laser interference lithography pattern

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageChinese
Pages (from-to)3157-3162
JournalHigh Power Laser and Particle Beams
Volume23
Issue number12
DOIs
Publication statusPublished - 2011
Publication typeA1 Journal article-refereed

Publication forum classification

Field of science, Statistics Finland