Multiscale modeling of anisotropic wet chemical etching of crystalline silicon
Research output: Contribution to journal › Article › Scientific › peer-review
Details
| Original language | English |
|---|---|
| Pages (from-to) | 467-473 |
| Journal | EPL |
| Volume | 60 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - 2002 |
| Externally published | Yes |
| Publication type | A1 Journal article-refereed |