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Multiscale modeling of anisotropic wet chemical etching of crystalline silicon

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Pages (from-to)467-473
JournalEPL
Volume60
Issue number3
DOIs
Publication statusPublished - 2002
Externally publishedYes
Publication typeA1 Journal article-refereed

Publication forum classification