Tampere University of Technology

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Nanofabrication by direct writing with four-beam laser interference and nanoimprint lithography

Research output: Book/ReportDoctoral thesisCollection of Articles

Details

Original languageEnglish
PublisherTampere University of Technology
ISBN (Print)978-952-15-3861-2
Publication statusPublished - 2 Dec 2016
Publication typeG5 Doctoral dissertation (article)

Publication series

NameTampere University of Technology. Publication
Volume1442
ISSN (Print)1459-2045

Field of science, Statistics Finland