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Noise minimized high resolution digital holographic microscopy applied to surface topography

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Pages (from-to)267-272
Number of pages6
JournalComputer Optics
Volume42
Issue number2
DOIs
Publication statusPublished - 1 Mar 2018
Publication typeA1 Journal article-refereed

Abstract

The topography of surface relief gratings was studied by digital holographic microscopy. The applicability of the method for quantitative measurements of surface microstructure at nanoscale was demonstrated. The method for wavefront reconstruction of surface relief from a digital hologram recorded in off-axis configuration was also applied. The main feature is noise filtration due to the presence of noise in the recorded intensity distribution and the use of all orders of the hologram. Reconstruction results proved a better effectiveness of our approach for topography studying of relief grating patterned on a ChG As2S3 - Se nanomultilayers in comparison with standard Fourier Transform and Atom Force Microscope methods.

Keywords

  • Diffraction gratings, Digital holography, Digital image processing

Publication forum classification

Field of science, Statistics Finland