Optical interference lithography using azobenzene-functionalized polymers for micro-and nanopatterning of silicon
Research output: Contribution to journal › Article › Scientific › peer-review
|Number of pages||4|
|Publication status||Published - 22 Sep 2011|
|Publication type||A1 Journal article-refereed|
Light-induced mass transport in azobenzene-functionalized polymers is exploited in optical interference lithography to fabricate large-area, periodic 1D and 2D silicon nanostructures. The demonstrated technique is a fast, reliable, and cost-effective alternative to conventional photoresist-based methods of nano-and microfabrication. Potential applications of the technique range from optics and photonics to functional materials and coatings.