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Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper

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Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper. / Vuoristo, P.; Mäntylä, T.; Kettunen, P.

In: Journal of Materials Science, Vol. 27, 1992, p. 4985-4996.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Vuoristo, P, Mäntylä, T & Kettunen, P 1992, 'Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper', Journal of Materials Science, vol. 27, pp. 4985-4996. https://doi.org/10.1007/BF01105264

APA

Vuoristo, P., Mäntylä, T., & Kettunen, P. (1992). Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper. Journal of Materials Science, 27, 4985-4996. https://doi.org/10.1007/BF01105264

Vancouver

Author

Vuoristo, P. ; Mäntylä, T. ; Kettunen, P. / Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper. In: Journal of Materials Science. 1992 ; Vol. 27. pp. 4985-4996.

Bibtex - Download

@article{056e545f23524fb2aaef9ff6aeb3fe12,
title = "Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper",
abstract = "Amorphous Al/sub 2/O/sub 3/ coatings were deposited on Cu substrates with metallic bond layers by different magnetron-sputtering processes. Such sputtering conditions as the type of discharge, target material, total pressure, sputtering gas composition and substrate temperature were varied to study the process effects on the structure and properties of the coatings deposited. The structure and general properties were found to be strongly dependent on the type of process and parameters. The breakdown voltages did not show any significant lowering as the temperature was increased from 20 to 400-500 degrees C. The maximum temperature without formation of cracks in the Al/sub 2/O/sub 3/ coating on Cu was about 700 degrees C. The d.c. electrical conductivities of the Al/sub 2/O/sub 3/ were similar to that of bulk Al/sub 2/O/sub 3/ at different temperatures. The results reveal the potential use of magnetron-sputtered Al/sub 2/O/sub 3/ coatings on Cu for electrical insulation and oxidation protection in different high-temperature applications, e.g. on metallic magnetohydrodynamic electrode and insulator modules. (32 References).",
author = "P. Vuoristo and T. M{\"a}ntyl{\"a} and P. Kettunen",
note = "Contribution: organisation=mol,FACT1=1",
year = "1992",
doi = "10.1007/BF01105264",
language = "English",
volume = "27",
pages = "4985--4996",
journal = "Journal of Materials Science",
issn = "0022-2461",
publisher = "Springer Verlag",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Properties of magnetron-sputtered electrically insulating Al2O3 coatings on copper

AU - Vuoristo, P.

AU - Mäntylä, T.

AU - Kettunen, P.

N1 - Contribution: organisation=mol,FACT1=1

PY - 1992

Y1 - 1992

N2 - Amorphous Al/sub 2/O/sub 3/ coatings were deposited on Cu substrates with metallic bond layers by different magnetron-sputtering processes. Such sputtering conditions as the type of discharge, target material, total pressure, sputtering gas composition and substrate temperature were varied to study the process effects on the structure and properties of the coatings deposited. The structure and general properties were found to be strongly dependent on the type of process and parameters. The breakdown voltages did not show any significant lowering as the temperature was increased from 20 to 400-500 degrees C. The maximum temperature without formation of cracks in the Al/sub 2/O/sub 3/ coating on Cu was about 700 degrees C. The d.c. electrical conductivities of the Al/sub 2/O/sub 3/ were similar to that of bulk Al/sub 2/O/sub 3/ at different temperatures. The results reveal the potential use of magnetron-sputtered Al/sub 2/O/sub 3/ coatings on Cu for electrical insulation and oxidation protection in different high-temperature applications, e.g. on metallic magnetohydrodynamic electrode and insulator modules. (32 References).

AB - Amorphous Al/sub 2/O/sub 3/ coatings were deposited on Cu substrates with metallic bond layers by different magnetron-sputtering processes. Such sputtering conditions as the type of discharge, target material, total pressure, sputtering gas composition and substrate temperature were varied to study the process effects on the structure and properties of the coatings deposited. The structure and general properties were found to be strongly dependent on the type of process and parameters. The breakdown voltages did not show any significant lowering as the temperature was increased from 20 to 400-500 degrees C. The maximum temperature without formation of cracks in the Al/sub 2/O/sub 3/ coating on Cu was about 700 degrees C. The d.c. electrical conductivities of the Al/sub 2/O/sub 3/ were similar to that of bulk Al/sub 2/O/sub 3/ at different temperatures. The results reveal the potential use of magnetron-sputtered Al/sub 2/O/sub 3/ coatings on Cu for electrical insulation and oxidation protection in different high-temperature applications, e.g. on metallic magnetohydrodynamic electrode and insulator modules. (32 References).

U2 - 10.1007/BF01105264

DO - 10.1007/BF01105264

M3 - Article

VL - 27

SP - 4985

EP - 4996

JO - Journal of Materials Science

JF - Journal of Materials Science

SN - 0022-2461

ER -