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RBS analysis of sputter-deposited MgO films

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RBS analysis of sputter-deposited MgO films. / Vuoristo, P.; Mäntylä, T.; Kettunen, P.; Lappalainen, R.

In: Vacuum, Vol. 42, No. 15, 1991, p. 1001-1004.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Vuoristo, P, Mäntylä, T, Kettunen, P & Lappalainen, R 1991, 'RBS analysis of sputter-deposited MgO films', Vacuum, vol. 42, no. 15, pp. 1001-1004. https://doi.org/10.1016/0042-207X(91)90007-6

APA

Vuoristo, P., Mäntylä, T., Kettunen, P., & Lappalainen, R. (1991). RBS analysis of sputter-deposited MgO films. Vacuum, 42(15), 1001-1004. https://doi.org/10.1016/0042-207X(91)90007-6

Vancouver

Vuoristo P, Mäntylä T, Kettunen P, Lappalainen R. RBS analysis of sputter-deposited MgO films. Vacuum. 1991;42(15):1001-1004. https://doi.org/10.1016/0042-207X(91)90007-6

Author

Vuoristo, P. ; Mäntylä, T. ; Kettunen, P. ; Lappalainen, R. / RBS analysis of sputter-deposited MgO films. In: Vacuum. 1991 ; Vol. 42, No. 15. pp. 1001-1004.

Bibtex - Download

@article{1ca373d817134249a80b9f45c094dcce,
title = "RBS analysis of sputter-deposited MgO films",
author = "P. Vuoristo and T. M{\"a}ntyl{\"a} and P. Kettunen and R. Lappalainen",
note = "Contribution: organisation=mol,FACT1=1",
year = "1991",
doi = "10.1016/0042-207X(91)90007-6",
language = "English",
volume = "42",
pages = "1001--1004",
journal = "Vacuum",
issn = "0042-207X",
publisher = "Elsevier",
number = "15",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - RBS analysis of sputter-deposited MgO films

AU - Vuoristo, P.

AU - Mäntylä, T.

AU - Kettunen, P.

AU - Lappalainen, R.

N1 - Contribution: organisation=mol,FACT1=1

PY - 1991

Y1 - 1991

U2 - 10.1016/0042-207X(91)90007-6

DO - 10.1016/0042-207X(91)90007-6

M3 - Article

VL - 42

SP - 1001

EP - 1004

JO - Vacuum

JF - Vacuum

SN - 0042-207X

IS - 15

ER -