Reactive Magnetron Sputtering of Zirconium Carbide Films Using Ar/CH4 Gas Mixtures
Research output: Contribution to journal › Article › Scientific › peer-review
Details
| Original language | English |
|---|---|
| Pages (from-to) | 166-170 |
| Journal | Surface and Coatings Technology |
| Volume | 59 |
| Publication status | Published - 1993 |
| Publication type | A1 Journal article-refereed |