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Round Robin computer simulation of ejection probability in sputtering

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Details

Original languageEnglish
Pages (from-to)110-123
Number of pages14
JournalNuclear Inst. and Methods in Physics Research, B
Volume36
Issue number2
DOIs
Publication statusPublished - 1 Feb 1989
Externally publishedYes
Publication typeNot Eligible

Abstract

We have studied the ejection of a copper atom through a planar copper surface as a function of recoil velocity and depth of origin. Results were obtained from six molecular dynamics codes, four binary collision lattice simulation codes, and eight Monte Carlo codes. Most results were found with a Born-Mayer interaction potential between the atoms with Gibson 2 parameters and a planar surface barrier, but variations on this standard were allowed for, as well as differences in the adopted cutoff radius for the interaction potential, electronic stopping, and target temperature. Large differences were found between the predictions of the various codes, but the cause of these differences could be determined in most cases. A fairly clear picture emerges from all three types of codes for the depth range and the angular range for ejection at energies relevant to sputter ejection, although a quantitative discussion would have to include an analysis of replacement collision events which has been left out here.