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Round Robin computer simulation of ejection probability in sputtering

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Round Robin computer simulation of ejection probability in sputtering. / Sigmund, P.; Robinson, M. T.; Baskes, M. I.; Hautala, M.; Cui, F. Z.; Eckstein, W.; Yamamura, Y.; Hosaka, S.; Ishitani, T.; Shulga, V. I.; Harrison, D. E.; Chakarov, I. R.; Karpuzo, D. S.; Kawatoh, E.; Shimizu, R.; Valkealahti, S.; Nieminen, R. M.; Betz, G.; Husinsky, W.; Shapiro, M. H.; Vicanek, M.; Urbassek, H. M.

In: Nuclear Inst. and Methods in Physics Research, B, Vol. 36, No. 2, 01.02.1989, p. 110-123.

Research output: Contribution to journalArticleScientificpeer-review

Harvard

Sigmund, P, Robinson, MT, Baskes, MI, Hautala, M, Cui, FZ, Eckstein, W, Yamamura, Y, Hosaka, S, Ishitani, T, Shulga, VI, Harrison, DE, Chakarov, IR, Karpuzo, DS, Kawatoh, E, Shimizu, R, Valkealahti, S, Nieminen, RM, Betz, G, Husinsky, W, Shapiro, MH, Vicanek, M & Urbassek, HM 1989, 'Round Robin computer simulation of ejection probability in sputtering', Nuclear Inst. and Methods in Physics Research, B, vol. 36, no. 2, pp. 110-123. https://doi.org/10.1016/0168-583X(89)90573-9

APA

Sigmund, P., Robinson, M. T., Baskes, M. I., Hautala, M., Cui, F. Z., Eckstein, W., ... Urbassek, H. M. (1989). Round Robin computer simulation of ejection probability in sputtering. Nuclear Inst. and Methods in Physics Research, B, 36(2), 110-123. https://doi.org/10.1016/0168-583X(89)90573-9

Vancouver

Sigmund P, Robinson MT, Baskes MI, Hautala M, Cui FZ, Eckstein W et al. Round Robin computer simulation of ejection probability in sputtering. Nuclear Inst. and Methods in Physics Research, B. 1989 Feb 1;36(2):110-123. https://doi.org/10.1016/0168-583X(89)90573-9

Author

Sigmund, P. ; Robinson, M. T. ; Baskes, M. I. ; Hautala, M. ; Cui, F. Z. ; Eckstein, W. ; Yamamura, Y. ; Hosaka, S. ; Ishitani, T. ; Shulga, V. I. ; Harrison, D. E. ; Chakarov, I. R. ; Karpuzo, D. S. ; Kawatoh, E. ; Shimizu, R. ; Valkealahti, S. ; Nieminen, R. M. ; Betz, G. ; Husinsky, W. ; Shapiro, M. H. ; Vicanek, M. ; Urbassek, H. M. / Round Robin computer simulation of ejection probability in sputtering. In: Nuclear Inst. and Methods in Physics Research, B. 1989 ; Vol. 36, No. 2. pp. 110-123.

Bibtex - Download

@article{71de51e33d67431d95d677b626a5da75,
title = "Round Robin computer simulation of ejection probability in sputtering",
abstract = "We have studied the ejection of a copper atom through a planar copper surface as a function of recoil velocity and depth of origin. Results were obtained from six molecular dynamics codes, four binary collision lattice simulation codes, and eight Monte Carlo codes. Most results were found with a Born-Mayer interaction potential between the atoms with Gibson 2 parameters and a planar surface barrier, but variations on this standard were allowed for, as well as differences in the adopted cutoff radius for the interaction potential, electronic stopping, and target temperature. Large differences were found between the predictions of the various codes, but the cause of these differences could be determined in most cases. A fairly clear picture emerges from all three types of codes for the depth range and the angular range for ejection at energies relevant to sputter ejection, although a quantitative discussion would have to include an analysis of replacement collision events which has been left out here.",
author = "P. Sigmund and Robinson, {M. T.} and Baskes, {M. I.} and M. Hautala and Cui, {F. Z.} and W. Eckstein and Y. Yamamura and S. Hosaka and T. Ishitani and Shulga, {V. I.} and Harrison, {D. E.} and Chakarov, {I. R.} and Karpuzo, {D. S.} and E. Kawatoh and R. Shimizu and S. Valkealahti and Nieminen, {R. M.} and G. Betz and W. Husinsky and Shapiro, {M. H.} and M. Vicanek and Urbassek, {H. M.}",
year = "1989",
month = "2",
day = "1",
doi = "10.1016/0168-583X(89)90573-9",
language = "English",
volume = "36",
pages = "110--123",
journal = "NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS",
issn = "0168-583X",
publisher = "Elsevier",
number = "2",

}

RIS (suitable for import to EndNote) - Download

TY - JOUR

T1 - Round Robin computer simulation of ejection probability in sputtering

AU - Sigmund, P.

AU - Robinson, M. T.

AU - Baskes, M. I.

AU - Hautala, M.

AU - Cui, F. Z.

AU - Eckstein, W.

AU - Yamamura, Y.

AU - Hosaka, S.

AU - Ishitani, T.

AU - Shulga, V. I.

AU - Harrison, D. E.

AU - Chakarov, I. R.

AU - Karpuzo, D. S.

AU - Kawatoh, E.

AU - Shimizu, R.

AU - Valkealahti, S.

AU - Nieminen, R. M.

AU - Betz, G.

AU - Husinsky, W.

AU - Shapiro, M. H.

AU - Vicanek, M.

AU - Urbassek, H. M.

PY - 1989/2/1

Y1 - 1989/2/1

N2 - We have studied the ejection of a copper atom through a planar copper surface as a function of recoil velocity and depth of origin. Results were obtained from six molecular dynamics codes, four binary collision lattice simulation codes, and eight Monte Carlo codes. Most results were found with a Born-Mayer interaction potential between the atoms with Gibson 2 parameters and a planar surface barrier, but variations on this standard were allowed for, as well as differences in the adopted cutoff radius for the interaction potential, electronic stopping, and target temperature. Large differences were found between the predictions of the various codes, but the cause of these differences could be determined in most cases. A fairly clear picture emerges from all three types of codes for the depth range and the angular range for ejection at energies relevant to sputter ejection, although a quantitative discussion would have to include an analysis of replacement collision events which has been left out here.

AB - We have studied the ejection of a copper atom through a planar copper surface as a function of recoil velocity and depth of origin. Results were obtained from six molecular dynamics codes, four binary collision lattice simulation codes, and eight Monte Carlo codes. Most results were found with a Born-Mayer interaction potential between the atoms with Gibson 2 parameters and a planar surface barrier, but variations on this standard were allowed for, as well as differences in the adopted cutoff radius for the interaction potential, electronic stopping, and target temperature. Large differences were found between the predictions of the various codes, but the cause of these differences could be determined in most cases. A fairly clear picture emerges from all three types of codes for the depth range and the angular range for ejection at energies relevant to sputter ejection, although a quantitative discussion would have to include an analysis of replacement collision events which has been left out here.

U2 - 10.1016/0168-583X(89)90573-9

DO - 10.1016/0168-583X(89)90573-9

M3 - Article

VL - 36

SP - 110

EP - 123

JO - NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS

JF - NUCLEAR INSTRUMENTS AND METHODS IN PHYSICS RESEARCH SECTION B: BEAM INTERACTIONS WITH MATERIALS AND ATOMS

SN - 0168-583X

IS - 2

ER -