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Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific

Details

Original languageEnglish
Title of host publication2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008
Pages81-85
ISBN (Electronic)978-1-897023-40-2
Publication statusPublished - 2008
Publication typeB3 Non-refereed article in conference proceedings

Publication forum classification