Mashayekhi, M., Winchester, L.,
Laurila, M-M.,
Mäntysalo, M., Ogier, S., Terés, L. & Carrabina, J.,
6 Mar 2017,
In : Journal of Micromechanics and Microengineering. 27,
4, 045009.
Research output: Contribution to journal › Article › Scientific › peer-review