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SiGe/Si heterostructures produced by double-energy Si+ and Ge+, and Ge+ and Ge2+ ion implantations

Research output: Contribution to journalArticleScientificpeer-review


Original languageEnglish
Pages (from-to)2629-2632
JournalJournal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures, Processing, Measurement, and Phenomena
Issue number5
Publication statusPublished - 1998
Publication typeA1 Journal article-refereed

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