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SiGe/Si Heterostructures Produced by Double-Energy Si+ and Ge+, and Ge+ and Ge2+ Ion Implantations

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientific


Original languageEnglish
Title of host publicationAmerican Vacuum Society, 44th National Symposium, October 20-24, 1997, San Jose Convention Center, San Jose, California, USA
Publication statusPublished - 1997
Publication typeB3 Non-refereed article in conference proceedings

Publication forum classification