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Silicon capillary gripper with self-alignment capability

Research output: Chapter in Book/Report/Conference proceedingConference contributionScientificpeer-review

Details

Original languageEnglish
Title of host publication2011 IEEE International Conference on Robotics and Automation, ICRA 2011
Pages4098-4103
Number of pages6
DOIs
Publication statusPublished - 2011
Publication typeA4 Article in a conference publication
Event2011 IEEE International Conference on Robotics and Automation, ICRA 2011 - Shanghai, China
Duration: 9 May 201113 May 2011

Conference

Conference2011 IEEE International Conference on Robotics and Automation, ICRA 2011
CountryChina
CityShanghai
Period9/05/1113/05/11

Abstract

This paper reports a novel capillary microgripper. The microgripper is fabricated from silicon using deep reactive ion etching and is designed to be especially suitable for self-alignment. The gripper is shown to retain its self-alignment capabilities even when the head of the gripper does not match the size of the component. This mechanism is analyzed using numerical simulations and tested in pick-and-place experiments using commercial laser diode components. The advantage of the capillary microgripper has been demonstrated in picking and aligning microchips from adhesive films, which requires substantial picking force.

Keywords

  • Capillary gripper, Micro/nano robots, Microhandling, Self-alignment