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Transformation of ALD grown TiO2 film to topographically microstructured titanium silicide for photonics applications

Research output: Book/ReportCommissioned reportProfessional


Original languageEnglish
Place of PublicationLund
PublisherLund University, MAX IV Laboratory
Number of pages2
Publication statusPublished - 2016
Publication typeD4 Published development or research report or study


  • titanium silicide, Synchrotron, photoemission electron microscopy

Publication forum classification