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Two-dimensional coupled electrostatic-mechanical model for RF MEMS switches

Research output: Contribution to journalArticleScientificpeer-review

Details

Original languageEnglish
Pages (from-to)26-36
Number of pages11
JournalApplied Computational Electromagnetics Society Journal
Volume21
Issue number1
Publication statusPublished - 2006
Publication typeA1 Journal article-refereed

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