Tampere University of Technology

TUTCRIS Research Portal

Vapour Deposited TiN and TiC Diffusion barriers

Research output: Book/ReportCommissioned reportProfessional

Details

Original languageEnglish
Place of PublicationTampere
PublisherTampere University of Technology
Number of pages10
Publication statusPublished - 1986
Publication typeD4 Published development or research report or study

Publication series

NameTampere University of Technology, Institute of Materials Science, Report
PublisherTampere University of Technology
No.26/1986

Publication forum classification