Tampere University of Technology

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Vapour Deposited TiN and TiC Diffusion Barriers

Research output: Book/ReportCommissioned reportProfessional

Details

Original languageEnglish
Place of PublicationTampere
PublisherTampere University of Technology
Publication statusPublished - 1987
Publication typeD4 Published development or research report or study

Publication series

NameTampere University of Technology, Institute of Materials Science, Report
PublisherTampere University of Technology
No.23/1987

Publication forum classification