TUTCRIS - Tampereen teknillinen yliopisto

TUTCRIS

High-resolution E-jet Enhanced MEMS Packaging

Tutkimustuotos: Konferenssiesitys, posteri tai abstrakti

Yksityiskohdat

AlkuperäiskieliEnglanti
SivumääräNA
Sivumäärä1
TilaJulkaistu - 27 elokuuta 2018
TapahtumaFirst International Conference on 4D Materials and Systems (4DMS) - Yamagata University, Yonezawa Campus, Yonezawa, Japani
Kesto: 26 elokuuta 201830 elokuuta 2018
http://ma.ecsdl.org/content/MA2018-03/2/128.short

Conference

ConferenceFirst International Conference on 4D Materials and Systems (4DMS)
MaaJapani
KaupunkiYonezawa
Ajanjakso26/08/1830/08/18
www-osoite

Tiivistelmä

High-resolution electrohydrodynamic inkjet printing has potential to simplify the existing MEMS package fabrication through its additive and digital properties without sacrifices in the I/O density of the package. Initially, the replacement of certain lithographic process steps would lead to decreased material consumption and increased cost-effectiveness of the package fabrication; in long term, the large-scale adoption of additive process steps would enable increasing device customizability and lead to cost-effective fabrication of small batches and even fully tailored device specific MEMS packages. In our work, we have demonstrated the feasibility of this approach by replacing selected lithographic process steps by using high-resolution inkjet technology (Super Inkjet, SIJ Tech.) for metallization of high-density redistribution layers (RDL), metallization of through-silicon-vias (TSV) and fabrication of under bump metallization (UBM).