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Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS

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Standard

Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. / Fischer, Andreas C.; Mäntysalo, Matti; Niklaus, Frank.

Handbook of Silicon Based MEMS Materials and Technologies. 2. toim. Elsevier, 2015. s. 550-564 (Micro and Nano Technologies).

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Harvard

Fischer, AC, Mäntysalo, M & Niklaus, F 2015, Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. julkaisussa Handbook of Silicon Based MEMS Materials and Technologies. 2 toim, Micro and Nano Technologies, Elsevier, Sivut 550-564. https://doi.org/10.1016/B978-0-323-29965-7.00026-9

APA

Fischer, A. C., Mäntysalo, M., & Niklaus, F. (2015). Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. teoksessa Handbook of Silicon Based MEMS Materials and Technologies (2 toim., Sivut 550-564). (Micro and Nano Technologies). Elsevier. https://doi.org/10.1016/B978-0-323-29965-7.00026-9

Vancouver

Fischer AC, Mäntysalo M, Niklaus F. Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. julkaisussa Handbook of Silicon Based MEMS Materials and Technologies. 2 toim. Elsevier. 2015. s. 550-564. (Micro and Nano Technologies). https://doi.org/10.1016/B978-0-323-29965-7.00026-9

Author

Fischer, Andreas C. ; Mäntysalo, Matti ; Niklaus, Frank. / Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS. Handbook of Silicon Based MEMS Materials and Technologies. 2. toim. Elsevier, 2015. Sivut 550-564 (Micro and Nano Technologies).

Bibtex - Lataa

@inbook{cdcda545851848d98ba895781d3069c1,
title = "Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS",
author = "Fischer, {Andreas C.} and Matti M{\"a}ntysalo and Frank Niklaus",
year = "2015",
doi = "10.1016/B978-0-323-29965-7.00026-9",
language = "English",
isbn = "978-0-323-29965-7",
series = "Micro and Nano Technologies",
publisher = "Elsevier",
pages = "550--564",
booktitle = "Handbook of Silicon Based MEMS Materials and Technologies",
address = "Netherlands",
edition = "2",

}

RIS (suitable for import to EndNote) - Lataa

TY - CHAP

T1 - Inkjet Printing, Laser Based Micromachining and Micro 3D Printing Technologies for MEMS

AU - Fischer, Andreas C.

AU - Mäntysalo, Matti

AU - Niklaus, Frank

PY - 2015

Y1 - 2015

U2 - 10.1016/B978-0-323-29965-7.00026-9

DO - 10.1016/B978-0-323-29965-7.00026-9

M3 - Chapter

SN - 978-0-323-29965-7

T3 - Micro and Nano Technologies

SP - 550

EP - 564

BT - Handbook of Silicon Based MEMS Materials and Technologies

PB - Elsevier

ER -