TUTCRIS - Tampereen teknillinen yliopisto

TUTCRIS

Noise minimized high resolution digital holographic microscopy applied to surface topography

Tutkimustuotosvertaisarvioitu

Yksityiskohdat

AlkuperäiskieliEnglanti
Sivut267-272
Sivumäärä6
JulkaisuComputer Optics
Vuosikerta42
Numero2
DOI - pysyväislinkit
TilaJulkaistu - 1 maaliskuuta 2018
OKM-julkaisutyyppiA1 Alkuperäisartikkeli

Tiivistelmä

The topography of surface relief gratings was studied by digital holographic microscopy. The applicability of the method for quantitative measurements of surface microstructure at nanoscale was demonstrated. The method for wavefront reconstruction of surface relief from a digital hologram recorded in off-axis configuration was also applied. The main feature is noise filtration due to the presence of noise in the recorded intensity distribution and the use of all orders of the hologram. Reconstruction results proved a better effectiveness of our approach for topography studying of relief grating patterned on a ChG As2S3 - Se nanomultilayers in comparison with standard Fourier Transform and Atom Force Microscope methods.