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Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

Tutkimustuotos

Standard

Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations. / Ylisaari, J.; Konkarikoski, K.; Ritala, R.; Kokko, T.; Mäntylä, M.

2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008. 2008. s. 81-85.

Tutkimustuotos

Harvard

Ylisaari, J, Konkarikoski, K, Ritala, R, Kokko, T & Mäntylä, M 2008, Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations. julkaisussa 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008. Sivut 81-85.

APA

Ylisaari, J., Konkarikoski, K., Ritala, R., Kokko, T., & Mäntylä, M. (2008). Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations. teoksessa 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008 (Sivut 81-85)

Vancouver

Ylisaari J, Konkarikoski K, Ritala R, Kokko T, Mäntylä M. Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations. julkaisussa 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008. 2008. s. 81-85

Author

Ylisaari, J. ; Konkarikoski, K. ; Ritala, R. ; Kokko, T. ; Mäntylä, M. / Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations. 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008. 2008. Sivut 81-85

Bibtex - Lataa

@inproceedings{0c87832ddf4f42c4b055f8a76e84b12e,
title = "Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations",
author = "J. Ylisaari and K. Konkarikoski and R. Ritala and T. Kokko and M. M{\"a}ntyl{\"a}",
note = "Contribution: organisation=ase mit,FACT1=1",
year = "2008",
language = "English",
isbn = "978-1-897023-39-1",
pages = "81--85",
booktitle = "2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008",

}

RIS (suitable for import to EndNote) - Lataa

TY - GEN

T1 - Scanner path as a manipulatable variable for optimal control and diagnostics of CD variations

AU - Ylisaari, J.

AU - Konkarikoski, K.

AU - Ritala, R.

AU - Kokko, T.

AU - Mäntylä, M.

N1 - Contribution: organisation=ase mit,FACT1=1

PY - 2008

Y1 - 2008

M3 - Conference contribution

SN - 978-1-897023-39-1

SP - 81

EP - 85

BT - 2008 Control Systems Pan-Pacific Conference. Conference Proceedings, June 16-18, Vancouver, Canada, 2008

ER -