Self-sustained secondary discharge in inductively coupled plasma reactor

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Standard

Self-sustained secondary discharge in inductively coupled plasma reactor. / Walewski, J.; Larjo, J.; Hernberg, R.

julkaisussa: Applied Physics Letters, Vuosikerta 76, Nro 18, 2000, s. 2508-2510.

Tutkimustuotos › › vertaisarvioitu

Harvard

Walewski, J, Larjo, J & Hernberg, R 2000, 'Self-sustained secondary discharge in inductively coupled plasma reactor', Applied Physics Letters, Vuosikerta. 76, Nro 18, Sivut 2508-2510.

APA

Walewski, J., Larjo, J., & Hernberg, R. (2000). Self-sustained secondary discharge in inductively coupled plasma reactor. Applied Physics Letters, 76(18), 2508-2510.

Vancouver

Walewski J, Larjo J, Hernberg R. Self-sustained secondary discharge in inductively coupled plasma reactor. Applied Physics Letters. 2000;76(18):2508-2510.

Author

Walewski, J. ; Larjo, J. ; Hernberg, R. / Self-sustained secondary discharge in inductively coupled plasma reactor. Julkaisussa: Applied Physics Letters. 2000 ; Vuosikerta 76, Nro 18. Sivut 2508-2510.

Bibtex - Lataa

@article{ce1d3b3e333148dd938bd11610797f44,

title = "Self-sustained secondary discharge in inductively coupled plasma reactor",

author = "J. Walewski and J. Larjo and R. Hernberg",

note = "Contribution: organisation=fys,FACT1=1",

year = "2000",

language = "English",

volume = "76",

pages = "2508--2510",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "AMER INST PHYSICS",

number = "18",

}

RIS (suitable for import to EndNote) - Lataa

TY - JOUR

T1 - Self-sustained secondary discharge in inductively coupled plasma reactor

AU - Walewski, J.

AU - Larjo, J.

AU - Hernberg, R.

N1 - Contribution: organisation=fys,FACT1=1

PY - 2000

Y1 - 2000

M3 - Article

VL - 76

SP - 2508

EP - 2510

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 18

ER -

TUTCRIS